Piezoelectric MEMS / / edited by Ulrich Schmid and Michael Schneider.
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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| Place / Publishing House: | Basel : : MDPI,, 2016. |
| Year of Publication: | 2016 |
| Language: | English |
| Physical Description: | 1 online resource (viii, 176 pages) :; illustrations |
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