Piezoelectric MEMS / / edited by Ulrich Schmid and Michael Schneider.
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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Place / Publishing House: | Basel : : MDPI,, 2016. |
Year of Publication: | 2016 |
Language: | English |
Physical Description: | 1 online resource (viii, 176 pages) :; illustrations |
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Piezoelectric MEMS / edited by Ulrich Schmid and Michael Schneider. Basel : MDPI, 2016. 1 online resource (viii, 176 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on publisher supplied metadata and other sources. Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This removes inherent physical limitations present in the commonly used electrostatic transducer approach, while maintaining beneficial properties such as low-power operation. In order to exploit the full potential of piezoelectric MEMS, interdisciplinary research efforts range from investigations of advanced piezoelectric materials over the design of novel piezoelectric MEMS sensor and actuator devices, to the integration of PiezoMEMS devices into full low-power systems. In this Special Issue, the current status of this exciting research field will be presented, covering a wide range of topics including, but not limited to: - Experimental and theoretical research on piezoelectric materials such as AlN, ScAlN, ZnO or PZT, PVDF with a strong focus on the application of MEMS devices. - Deposition and synthesis techniques for piezoelectric materials enabling integration of those materials into MEMS fabrication processes. - Modelling and simulation of piezoelectric MEMS devices and systems. - Piezoelectric MEMS resonators for measuring physical quantities such as mass, acceleration, yaw rate, pressure and viscosity or density of liquids. - Optical MEMS devices, such as scanning micro mirror devices and optical switches, based on piezoelectric MEMS. - Acoustic devices, such as SAW, BAW or FBARs and acoustic transducers, based on piezoelectric MEMS, such as microphones or loudspeakers. - Piezoelectric energy harvesting devices. - Specific packaging aspects of piezoelectric devices and systems. - Low and zero power systems, featuring low-power sensors combined with energy harvesting devices, at least one of which is based on piezoelectric MEMS. Includes bibliographical references. Thin films. Piezoelectric transducers. Schmid, Ulrich, 1965- editor. Schneider, Michael, editor. |
language |
English |
format |
eBook |
author2 |
Schmid, Ulrich, 1965- Schneider, Michael, |
author_facet |
Schmid, Ulrich, 1965- Schneider, Michael, |
author2_variant |
u s us m s ms |
author2_role |
TeilnehmendeR TeilnehmendeR |
title |
Piezoelectric MEMS / |
spellingShingle |
Piezoelectric MEMS / |
title_full |
Piezoelectric MEMS / edited by Ulrich Schmid and Michael Schneider. |
title_fullStr |
Piezoelectric MEMS / edited by Ulrich Schmid and Michael Schneider. |
title_full_unstemmed |
Piezoelectric MEMS / edited by Ulrich Schmid and Michael Schneider. |
title_auth |
Piezoelectric MEMS / |
title_new |
Piezoelectric MEMS / |
title_sort |
piezoelectric mems / |
publisher |
MDPI, |
publishDate |
2016 |
physical |
1 online resource (viii, 176 pages) : illustrations |
isbn |
3-03897-006-9 |
callnumber-first |
T - Technology |
callnumber-subject |
TK - Electrical and Nuclear Engineering |
callnumber-label |
TK7872 |
callnumber-sort |
TK 47872 P54 P549 42016 |
illustrated |
Illustrated |
dewey-hundreds |
600 - Technology |
dewey-tens |
680 - Manufacture for specific uses |
dewey-ones |
681 - Precision instruments & other devices |
dewey-full |
681.2 |
dewey-sort |
3681.2 |
dewey-raw |
681.2 |
dewey-search |
681.2 |
work_keys_str_mv |
AT schmidulrich piezoelectricmems AT schneidermichael piezoelectricmems |
status_str |
n |
ids_txt_mv |
(CKB)5400000000000663 (NjHacI)995400000000000663 (EXLCZ)995400000000000663 |
carrierType_str_mv |
cr |
is_hierarchy_title |
Piezoelectric MEMS / |
author2_original_writing_str_mv |
noLinkedField noLinkedField |
_version_ |
1796653209492652033 |
fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02979nam a2200313 i 4500</leader><controlfield tag="001">993603427904498</controlfield><controlfield tag="005">20230624001600.0</controlfield><controlfield tag="006">m o d </controlfield><controlfield tag="007">cr |||||||||||</controlfield><controlfield tag="008">230624s2016 sz a ob 000 0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3-03897-006-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CKB)5400000000000663</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(NjHacI)995400000000000663</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(EXLCZ)995400000000000663</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">NjHacI</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="c">NjHacl</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7872.P54</subfield><subfield code="b">.P549 2016</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">681.2</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="0" ind2="0"><subfield code="a">Piezoelectric MEMS /</subfield><subfield code="c">edited by Ulrich Schmid and Michael Schneider.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Basel :</subfield><subfield code="b">MDPI,</subfield><subfield code="c">2016.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (viii, 176 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on publisher supplied metadata and other sources.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This removes inherent physical limitations present in the commonly used electrostatic transducer approach, while maintaining beneficial properties such as low-power operation. In order to exploit the full potential of piezoelectric MEMS, interdisciplinary research efforts range from investigations of advanced piezoelectric materials over the design of novel piezoelectric MEMS sensor and actuator devices, to the integration of PiezoMEMS devices into full low-power systems. In this Special Issue, the current status of this exciting research field will be presented, covering a wide range of topics including, but not limited to: - Experimental and theoretical research on piezoelectric materials such as AlN, ScAlN, ZnO or PZT, PVDF with a strong focus on the application of MEMS devices. - Deposition and synthesis techniques for piezoelectric materials enabling integration of those materials into MEMS fabrication processes. - Modelling and simulation of piezoelectric MEMS devices and systems. - Piezoelectric MEMS resonators for measuring physical quantities such as mass, acceleration, yaw rate, pressure and viscosity or density of liquids. - Optical MEMS devices, such as scanning micro mirror devices and optical switches, based on piezoelectric MEMS. - Acoustic devices, such as SAW, BAW or FBARs and acoustic transducers, based on piezoelectric MEMS, such as microphones or loudspeakers. - Piezoelectric energy harvesting devices. - Specific packaging aspects of piezoelectric devices and systems. - Low and zero power systems, featuring low-power sensors combined with energy harvesting devices, at least one of which is based on piezoelectric MEMS.</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Thin films.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Piezoelectric transducers.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Schmid, Ulrich,</subfield><subfield code="d">1965-</subfield><subfield code="e">editor.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Schneider, Michael,</subfield><subfield code="e">editor.</subfield></datafield><datafield tag="906" ind1=" " ind2=" "><subfield code="a">BOOK</subfield></datafield><datafield tag="ADM" ind1=" " ind2=" "><subfield code="b">2023-07-06 03:31:13 Europe/Vienna</subfield><subfield code="f">system</subfield><subfield code="c">marc21</subfield><subfield code="a">2020-10-31 22:37:04 Europe/Vienna</subfield><subfield code="g">false</subfield></datafield><datafield tag="AVE" ind1=" " ind2=" "><subfield code="i">DOAB Directory of Open Access Books</subfield><subfield code="P">DOAB Directory of Open Access Books</subfield><subfield code="x">https://eu02.alma.exlibrisgroup.com/view/uresolver/43ACC_OEAW/openurl?u.ignore_date_coverage=true&portfolio_pid=5337907260004498&Force_direct=true</subfield><subfield code="Z">5337907260004498</subfield><subfield code="b">Available</subfield><subfield code="8">5337907260004498</subfield></datafield></record></collection> |