Laser-based nano fabrication and nano lithography / / edited by Koji Sugioka, Ya Cheng.
The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...
Saved in:
| TeilnehmendeR: | |
|---|---|
| Place / Publishing House: | Basel, Switzerland : : MDPI,, 2018. |
| Year of Publication: | 2018 |
| Language: | English |
| Physical Description: | 1 online resource (154 pages) |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Search Result 1