Micro/Nano Structures and Systems : : Analysis, Design, Manufacturing, and Reliability / / Stelios K Georgantzinos, editor.
Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the la...
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| Place / Publishing House: | [Place of publication not identified] : : MDPI - Multidisciplinary Digital Publishing Institute,, 2023. |
| Year of Publication: | 2023 |
| Language: | English |
| Physical Description: | 1 online resource (322 pages) |
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Table of Contents:
- About the Editor vi
- Editorial for the Special Issue on Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability 1
- Review Paper: Residual Stresses in Deposited Thin-Film Material Layers for Micro- and Nano-Systems Manufacturing 7
- Optimization of Quality, Reliability, and Warranty Policies for Micromachines under Wear Degradation 63
- An Annular Fresnel Zone Plate without Central Spots Fabricated by Femtosecond Laser Direct Writing 79
- Design of a Cylindrical Compliant Linear Guide with Decoupling Parallelogram Mechanisms 91
- Performance Evaluation of Different Coating Materials in Delamination for Micro-Milling Applications on High-Speed Steel Substrate 105
- Implementation of Flip-Chip Microbump Bonding between InP and SiC Substrates for Millimeter-Wave Applications 125
- Numerical Study on the Cavitation Characteristics of Micro Automotive Electronic Pumps under Thermodynamic Effect 139
- Electrochemical Milling of Deep-Narrow Grooves on GH4169 Alloy Using Tube Electrode with Wedged End Face 157
- Study on Solidification Process and Residual Stress of SiCp/Al Composites in EDM 173
- Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication 189
- Design Aspects of Additive Manufacturing at Microscale: A Review 213
- A Comparative Evaluation of Magnetorheological Micropump Designs 237
- Sensor Based on a Metal-Insulator-Metal Bus Waveguide Coupled with a U-Shaped Ring Resonator 257
- Latest Performance Improvement Strategies and Techniques Used in 5G Antenna Designing Technology, a Comprehensive Study 267
- Design of Deployable Structures by Using Bistable Compliant Mechanisms 295.