Piezoelectric MEMS / / edited by Ulrich Schmid, Michael Schneider.
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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| Place / Publishing House: | Basel, Switzerland : : MDPI - Multidisciplinary Digital Publishing Institute,, [2018] ©2018 |
| Year of Publication: | 2018 |
| Language: | English |
| Physical Description: | 1 online resource (176 pages) |
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Table of Contents:
- About the Special Issue Editors
- Editorial for the Special Issue on Piezoelectric MEMS
- Compensation of Hysteresis on Piezoelectric Actuators Based on Tripartite PI Model
- Modeling and Identification of the Rate-Dependent Hysteresis of Piezoelectric Actuator Using a Modified Prandtl-Ishlinskii Model
- Transparent Ferroelectric Capacitors on Glass
- Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
- Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification
- Influences of Excitation on Dynamic Characteristics of Piezoelectric Micro-Jets
- Comparative Influences of Fluid and Shell on Modeled Ejection Performance of a Piezoelectric Micro-Jet
- A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation
- Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring
- MEMS Gyroscopes Based on Acoustic Sagnac Effect
- Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
- Design, Characterization and Sensitivity Analysis of a Piezoelectric Ceramic/Metal Composite Transducer
- Parametric Analysis and Experimental Verification of a Hybrid Vibration Energy Harvester Combining Piezoelectric and Electromagnetic Mechanisms.