Recent Advances in Nanofabrication Techniques and Applications / / editor, Bo Cui.
Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and &q...
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Place / Publishing House: | Rijeka [Croatia] : : InTech,, 2011. ©2011 |
Year of Publication: | 2011 |
Language: | English |
Physical Description: | 1 online resource (xiii, 614 pages) :; illustrations (some color) |
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(CKB)3230000000076810 (NjHacI)993230000000076810 (oapen)https://directory.doabooks.org/handle/20.500.12854/65337 (EXLCZ)993230000000076810 |
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Recent Advances in Nanofabrication Techniques and Applications / editor, Bo Cui. Rijeka [Croatia] : InTech, 2011. ©2011 1 online resource (xiii, 614 pages) : illustrations (some color) text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on: online resource; title from PDF information screen (InTech, viewed October 17, 2022). Includes bibliographical references. Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography. English Lithography. 953-307-602-X Cui, Bo, 1971- editor. |
language |
English |
format |
eBook |
author2 |
Cui, Bo, 1971- |
author_facet |
Cui, Bo, 1971- |
author2_variant |
b c bc |
author2_role |
TeilnehmendeR |
title |
Recent Advances in Nanofabrication Techniques and Applications / |
spellingShingle |
Recent Advances in Nanofabrication Techniques and Applications / |
title_full |
Recent Advances in Nanofabrication Techniques and Applications / editor, Bo Cui. |
title_fullStr |
Recent Advances in Nanofabrication Techniques and Applications / editor, Bo Cui. |
title_full_unstemmed |
Recent Advances in Nanofabrication Techniques and Applications / editor, Bo Cui. |
title_auth |
Recent Advances in Nanofabrication Techniques and Applications / |
title_new |
Recent Advances in Nanofabrication Techniques and Applications / |
title_sort |
recent advances in nanofabrication techniques and applications / |
publisher |
InTech, |
publishDate |
2011 |
physical |
1 online resource (xiii, 614 pages) : illustrations (some color) |
isbn |
953-51-5554-7 953-307-602-X |
callnumber-first |
N - Fine Arts |
callnumber-subject |
NE - Print Media |
callnumber-label |
NE2420 |
callnumber-sort |
NE 42420 R434 42011 |
illustrated |
Illustrated |
dewey-hundreds |
700 - Arts & recreation |
dewey-tens |
760 - Graphic arts |
dewey-ones |
763 - Lithographic processes |
dewey-full |
763 |
dewey-sort |
3763 |
dewey-raw |
763 |
dewey-search |
763 |
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AT cuibo recentadvancesinnanofabricationtechniquesandapplications |
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(CKB)3230000000076810 (NjHacI)993230000000076810 (oapen)https://directory.doabooks.org/handle/20.500.12854/65337 (EXLCZ)993230000000076810 |
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Recent Advances in Nanofabrication Techniques and Applications / |
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