Nanofabrication using focused ion and electron beams : principles and applications / / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
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| Year of Publication: | 2011 |
| Language: | English |
| Series: | Nanomanufacturing series ;
v. 1 |
| Online Access: | |
| Physical Description: | xvi, 813 p. |
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| ISBN: | 9780199734214 9780199920990 |
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| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. |