Nanofabrication using focused ion and electron beams : principles and applications / / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

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Year of Publication:2011
Language:English
Series:Nanomanufacturing series ; v. 1
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Physical Description:xvi, 813 p.
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245 0 0 |a Nanofabrication using focused ion and electron beams  |h [electronic resource] :  |b principles and applications /  |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. 
260 |a Oxford ;  |a New York :  |b Oxford University Press,  |c 2011. 
300 |a xvi, 813 p. 
490 0 |a Nanomanufacturing series ;  |v v. 1 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Nanostructured materials. 
650 0 |a Nanotechnology. 
650 0 |a Electron beams  |x Industrial applications. 
650 0 |a Ion bombardment  |x Industrial applications. 
655 4 |a Electronic books. 
700 1 |a Utke, Ivo. 
700 1 |a Moshkalev, Stanislav. 
700 1 |a Russell, Phillip,  |d 1955- 
710 2 |a ProQuest (Firm) 
856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=886626  |z Click to View