Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / / edited by Kenichi Takahata.
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...
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Place / Publishing House: | Rijeka, Croatia : : InTech,, 2013. |
Year of Publication: | 2013 |
Language: | English |
Physical Description: | 1 online resource (236 pages) :; illustrations some color |
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(CKB)3780000000053893 (NjHacI)993780000000053893 (oapen)https://directory.doabooks.org/handle/20.500.12854/66541 (EXLCZ)993780000000053893 |
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Takahata, Kenichi edt Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / edited by Kenichi Takahata. IntechOpen 2013 Rijeka, Croatia : InTech, 2013. 1 online resource (236 pages) : illustrations some color text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on: online resource; title from PDF information screen (Intech, viewed October 19, 2022). Includes bibliographical references. Open access Unrestricted online access star MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials. English Optical physics. Manufacturing processes. Electricity, electromagnetism & magnetism Takahata, Kenichi , editor. |
language |
English |
format |
eBook |
author2 |
Takahata, Kenichi , |
author_facet |
Takahata, Kenichi , |
author2_variant |
k t kt k t kt |
author2_role |
TeilnehmendeR |
title |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / |
spellingShingle |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / |
title_full |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / edited by Kenichi Takahata. |
title_fullStr |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / edited by Kenichi Takahata. |
title_full_unstemmed |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / edited by Kenichi Takahata. |
title_auth |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / |
title_new |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / |
title_sort |
advances in micro/nano electromechanical systems and fabrication technologies / |
publisher |
IntechOpen InTech, |
publishDate |
2013 |
physical |
1 online resource (236 pages) : illustrations some color |
isbn |
953-51-6344-2 953-51-1085-3 |
callnumber-first |
T - Technology |
callnumber-subject |
TS - Manufactures |
callnumber-label |
TS183 |
callnumber-sort |
TS 3183 A383 42013 |
illustrated |
Illustrated |
dewey-hundreds |
600 - Technology |
dewey-tens |
670 - Manufacturing |
dewey-ones |
670 - Manufacturing |
dewey-full |
670 |
dewey-sort |
3670 |
dewey-raw |
670 |
dewey-search |
670 |
work_keys_str_mv |
AT takahatakenichi advancesinmicronanoelectromechanicalsystemsandfabricationtechnologies |
status_str |
n |
ids_txt_mv |
(CKB)3780000000053893 (NjHacI)993780000000053893 (oapen)https://directory.doabooks.org/handle/20.500.12854/66541 (EXLCZ)993780000000053893 |
carrierType_str_mv |
cr |
is_hierarchy_title |
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / |
author2_original_writing_str_mv |
noLinkedField |
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1796648795667169280 |
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