Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies / / edited by Kenichi Takahata.
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...
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| Place / Publishing House: | Rijeka, Croatia : : InTech,, 2013. |
| Year of Publication: | 2013 |
| Language: | English |
| Physical Description: | 1 online resource (236 pages) :; illustrations some color |
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Electronic
| DOAB Directory of Open Access Books | Available |