Micro/Nanolithography : : A Heuristic Aspect on the Enduring Technology / / edited by Jagannathan Thirumalai.
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic...
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Place / Publishing House: | Croatia : : IntechOpen,, 2018. |
Year of Publication: | 2018 |
Language: | English |
Physical Description: | 1 online resource (134 pages) :; illustrations |
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(CKB)4970000000099860 (NjHacI)994970000000099860 (oapen)https://directory.doabooks.org/handle/20.500.12854/53388 (EXLCZ)994970000000099860 |
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Jagannathan Thirumalai auth Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / edited by Jagannathan Thirumalai. Micro/nanolithography IntechOpen 2018 Croatia : IntechOpen, 2018. 1 online resource (134 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on publisher supplied metadata and other sources. Includes bibliographical references. The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction of periodic nanopyramid structures using UV nanoimprint lithography for solar cell applications, large-area nanoimprint lithography and applications, micro-/nanopatterning on polymers, OPC under immersion lithography associated to novel luminescence applications, achromatic Talbot lithography (ATL) and the soft X-ray interference lithography. Individual chapters provide a base for a wide range of readers from different fiels, students and researchers, who may be doing research pertinent to the topics discussed in this book and find basic as well as advanced principles of designated subjects related to these phenomena explained plainly. The book contains six chapters by experts in different fields of lithographic fabrication and technology from over 15 research institutes across the globe. English Microlithography. Engineering Physical Sciences Engineering and Technology Electrical and Electronic Engineering Nano Electronics 1-78923-030-6 Thirumalai, Jagannathan, editor. |
language |
English |
format |
eBook |
author |
Jagannathan Thirumalai |
spellingShingle |
Jagannathan Thirumalai Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / |
author_facet |
Jagannathan Thirumalai Thirumalai, Jagannathan, |
author_variant |
j t jt |
author2 |
Thirumalai, Jagannathan, |
author2_variant |
j t jt |
author2_role |
TeilnehmendeR |
author_sort |
Jagannathan Thirumalai |
title |
Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / |
title_sub |
A Heuristic Aspect on the Enduring Technology / |
title_full |
Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / edited by Jagannathan Thirumalai. |
title_fullStr |
Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / edited by Jagannathan Thirumalai. |
title_full_unstemmed |
Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / edited by Jagannathan Thirumalai. |
title_auth |
Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / |
title_alt |
Micro/nanolithography |
title_new |
Micro/Nanolithography : |
title_sort |
micro/nanolithography : a heuristic aspect on the enduring technology / |
publisher |
IntechOpen IntechOpen, |
publishDate |
2018 |
physical |
1 online resource (134 pages) : illustrations |
isbn |
1-83881-293-8 1-78923-031-4 1-78923-030-6 |
callnumber-first |
T - Technology |
callnumber-subject |
TK - Electrical and Nuclear Engineering |
callnumber-label |
TK7872 |
callnumber-sort |
TK 47872 M3 M537 42018 |
illustrated |
Illustrated |
dewey-hundreds |
600 - Technology |
dewey-tens |
620 - Engineering |
dewey-ones |
621 - Applied physics |
dewey-full |
621.381531 |
dewey-sort |
3621.381531 |
dewey-raw |
621.381531 |
dewey-search |
621.381531 |
work_keys_str_mv |
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(CKB)4970000000099860 (NjHacI)994970000000099860 (oapen)https://directory.doabooks.org/handle/20.500.12854/53388 (EXLCZ)994970000000099860 |
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Micro/Nanolithography : A Heuristic Aspect on the Enduring Technology / |
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