Micro/Nanolithography : : A Heuristic Aspect on the Enduring Technology / / edited by Jagannathan Thirumalai.
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic...
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| Place / Publishing House: | Croatia : : IntechOpen,, 2018. |
| Year of Publication: | 2018 |
| Language: | English |
| Physical Description: | 1 online resource (134 pages) :; illustrations |
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Electronic
| DOAB Directory of Open Access Books | Available |