Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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Superior document: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel |
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Year of Publication: | 2013 |
Language: | English |
Series: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
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Physical Description: | 1 electronic resource (XIII, 175 p. p.) |
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100 | 1 | |a Meckbach, Johannes Maximilian |4 auth | |
245 | 1 | 0 | |a Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications |
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490 | 1 | |a Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel | |
520 | |a Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail. | ||
546 | |a English | ||
653 | |a Superconductor | ||
653 | |a Quantum | ||
653 | |a Multilayer | ||
653 | |a Cryogenics | ||
653 | |a Josephson | ||
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