Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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| Superior document: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel |
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| Year of Publication: | 2013 |
| Language: | English |
| Series: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
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| Physical Description: | 1 electronic resource (XIII, 175 p. p.) |
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Electronic
| DOAB Directory of Open Access Books | Available |