Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes...
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Romano, Lucia edt Micro- and Nano-Fabrication by Metal Assisted Chemical Etching Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute 2021 1 electronic resource (106 p.) text txt rdacontent computer c rdamedia online resource cr rdacarrier Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications. English History of engineering & technology bicssc porous silicon Pd nanoparticles-assisted chemical etching etching rate ethanol electrooxidation X-ray diffractive optics zone plate high aspect ratio nanostructures metal-assisted chemical etching electroless deposition Al2O3 nanotube ultra-high aspect ratio gold (Au) metal assisted chemical etching atomic layer deposition anisotropic dry etching silicon cones metal assisted chemical etching transversal pores antireflection black GaAs photon recycling X-ray grating interferometry catalyst silicon gold electroplating magnetically guided metal-assisted chemical etching bulk Si etching curved Si structure catalyst encapsulation 3-03943-845-X 3-03943-846-8 Romano, Lucia oth |
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English |
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Romano, Lucia |
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Romano, Lucia |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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micro- and nano-fabrication by metal assisted chemical etching |
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MDPI - Multidisciplinary Digital Publishing Institute |
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2021 |
physical |
1 electronic resource (106 p.) |
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3-03943-845-X 3-03943-846-8 |
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Not Illustrated |
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AT romanolucia microandnanofabricationbymetalassistedchemicaletching |
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(CKB)5400000000040808 (oapen)https://directory.doabooks.org/handle/20.500.12854/68292 (EXLCZ)995400000000040808 |
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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching |
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