Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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Superior document: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik |
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Year of Publication: | 2013 |
Language: | German |
Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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Physical Description: | 1 electronic resource (XVI, 133 p. p.) |
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