Application of diffractive lens arrays in confocal microscopy /

Application of diffractive lens arrays in confocal microscopy / / Zheng Li.

Diffractive lens arrays are proposed in this work for application in reflected-light confocal microscopes. They have overcome the limitations between fields of view and resolution of traditional objectives. Experiments of multi-spot confocal imaging in surface metrology and fluorescence microscopy h...

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Bibliographic Details
VerfasserIn:
Li, Zheng,
Place / Publishing House:Karlsruhe : : KIT Scientific Publishing,, [2022]
©2022
Year of Publication:2022
Language:English
Series:Schriftenreihe automatische Sichtprüfung und Bildverarbeitung
Physical Description:1 online resource (xv, 148 pages) :; illustrations
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Table of Contents:
  • Abstract
  • Kurzfassung
  • Acknowledgements
  • Notation
  • Acronyms
  • 1 Introduction
  • 1.1 Motivation
  • 1.2 Related work
  • 1.3 Main contributions
  • 1.4 Thesis outline
  • 2 Theoretical Background
  • 2.1 Diffraction simulation
  • 2.1.1 Maxwell's equations
  • 2.1.2 Scalar approximation and solutions
  • 2.1.3 Numerical implementation
  • 2.2 Theory of confocal microscopy
  • 2.2.1 Focusing by a thin lens
  • 2.2.2 PSF of a thin lens
  • 2.2.3 PSF of a confocal scanning microscope
  • 3 Design and Simulation
  • 3.1 See-through DLA design
  • 3.1.1 System overview
  • 3.1.2 Design process
  • 3.1.3 Simulation and optimization
  • 3.2 Direct-imaging DLA design
  • 3.2.1 System overview
  • 3.2.2 Design process
  • 3.2.3 Simulation and optimization
  • 4 Experiment Results
  • 4.1 Spot characterization
  • 4.1.1 Spot measurement of See-through DLAs
  • 4.1.2 Spot measurement of Direct-imaging DLAs
  • 4.2 Lateral measurement
  • 4.2.1 Lateral measurement by See-through DLAs
  • 4.2.2 Lateral measurement by Direct-imaging DLAs
  • 4.3 Axial measurement
  • 4.3.1 Axial response of See-through DLAs
  • 4.3.2 Axial response of Direct-imaging DLAs
  • 4.3.3 Interference measurement by See-through DLAs
  • 4.3.4 Measurement of a step height target
  • 4.4 Fluorescence measurement
  • 5 Conclusions
  • 5.1 Summary of the work
  • 5.2 Outlook
  • Bibliography
  • Publications
  • Appendix
  • A Kirchhoff's Diffraction Formulation.

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