Atmoic layer deposition of artificially structured dielectrik materials

Atmoic layer deposition of artificially structured dielectrik materials / Kaupo Kukli

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Bibliographic Details
Superior document:Dissertationes physicae Universitatis Tartuensis 27
VerfasserIn:
Kukli, Kaupo
Place / Publishing House:Tartu : Tartu Univ. Pr., 1999
Year of Publication:1999
Language:English
Series:Dissertationes physicae Universitatis Tartuensis 27
Physical Description:159 S.; Ill., graph. Darst.
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Atmoic layer deposition of artificially structured dielectrik materials Kaupo Kukli
Tartu Tartu Univ. Pr. 1999
159 S. Ill., graph. Darst.
Dissertationes physicae Universitatis Tartuensis 27
Zugl.: Tartu, Univ., Diss., 1999
(AT-OBV)AC02938105 27
YWOAW MAG1 81528.27 2216981530004498
language English
format Thesis
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author Kukli, Kaupo
spellingShingle Kukli, Kaupo
Atmoic layer deposition of artificially structured dielectrik materials
Dissertationes physicae Universitatis Tartuensis
author_facet Kukli, Kaupo
author_variant k k kk
author_role VerfasserIn
author_sort Kukli, Kaupo
title Atmoic layer deposition of artificially structured dielectrik materials
title_full Atmoic layer deposition of artificially structured dielectrik materials Kaupo Kukli
title_fullStr Atmoic layer deposition of artificially structured dielectrik materials Kaupo Kukli
title_full_unstemmed Atmoic layer deposition of artificially structured dielectrik materials Kaupo Kukli
title_auth Atmoic layer deposition of artificially structured dielectrik materials
title_new Atmoic layer deposition of artificially structured dielectrik materials
title_sort atmoic layer deposition of artificially structured dielectrik materials
series Dissertationes physicae Universitatis Tartuensis
series2 Dissertationes physicae Universitatis Tartuensis
publisher Tartu Univ. Pr.
publishDate 1999
physical 159 S. Ill., graph. Darst.
isbn 9985563883
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container_title Dissertationes physicae Universitatis Tartuensis 27
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