Atmoic layer deposition of artificially structured dielectrik materials / Kaupo Kukli
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| Superior document: | Dissertationes physicae Universitatis Tartuensis 27 |
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| VerfasserIn: | |
| Place / Publishing House: | Tartu : Tartu Univ. Pr., 1999 |
| Year of Publication: | 1999 |
| Language: | English |
| Series: | Dissertationes physicae Universitatis Tartuensis
27 |
| Physical Description: | 159 S.; Ill., graph. Darst. |
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| ISBN: | 9985563883 |
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| ac_no: | AC06782971 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Kaupo Kukli |