Optical Metrology for Precision Engineering / / Wei Gao, Yuki Shimizu.

• Superior document: Title is part of eBook package: De Gruyter DG Plus DeG Package 2022 Part 1
• VerfasserIn: Gao, Wei,; Shimizu, Yuki,
• Place / Publishing House: Berlin ;, Boston : : De Gruyter, , [2021]; ©2022
• Year of Publication: 2021
• Language: English
• Physical Description: 1 online resource (XI, 644 p.)
• Other title: Frontmatter --; Preface --; Contents --; Chapter 1 Laser autocollimator --; Chapter 2 Three-axis angle sensor --; Chapter 3 Surface encoder --; Chapter 4 Mosaic encoder --; Chapter 5 In-line and on-machine surface profiler --; Chapter 6 Fabrication and calibration of scale grating --; Chapter 7 Ultrashort-pulse angle sensor --; Chapter 8 Optical frequency comb --; Chapter 9 Angle comb --; Chapter 10 Chromatic confocal comb --; Chapter 11 Position comb --; Chapter 12 Optical comb applied metrology --; Index
• Format: Mode of access: Internet via World Wide Web.
• ISBN: 9783110542363; 9783110766820; 9783110754001; 9783110753776; 9783110754070; 9783110753837
• DOI: 10.1515/9783110542363
• Access: restricted access
• Hierarchical level: Monograph
• Statement of Responsibility: Wei Gao, Yuki Shimizu.

This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.• Introduces fundamental theories and techniques• Combines theories with practical applications• Presents technologies in an easy-to-understand way