Semiconductor strain metrology : principles and applications / / Terence K.S. Wong.
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Year of Publication: | 2012 |
Language: | English |
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Physical Description: | 136 p. :; ill. |
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Wong, Terence K. S. Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong. [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012] 136 p. : ill. Includes bibliographical references and index. Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. Semiconductors Design and construction Materials. Compound semiconductors Design and construction Materials. Silicon-on-insulator technology. Electronic books. ProQuest (Firm) https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=976639 Click to View |
language |
English |
format |
Electronic eBook |
author |
Wong, Terence K. S. |
spellingShingle |
Wong, Terence K. S. Semiconductor strain metrology principles and applications / |
author_facet |
Wong, Terence K. S. ProQuest (Firm) ProQuest (Firm) |
author_variant |
t k s w tks tksw |
author2 |
ProQuest (Firm) |
author2_role |
TeilnehmendeR |
author_corporate |
ProQuest (Firm) |
author_sort |
Wong, Terence K. S. |
title |
Semiconductor strain metrology principles and applications / |
title_sub |
principles and applications / |
title_full |
Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong. |
title_fullStr |
Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong. |
title_full_unstemmed |
Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong. |
title_auth |
Semiconductor strain metrology principles and applications / |
title_new |
Semiconductor strain metrology |
title_sort |
semiconductor strain metrology principles and applications / |
publisher |
Bentham Science, |
publishDate |
2012 |
physical |
136 p. : ill. |
callnumber-first |
T - Technology |
callnumber-subject |
TK - Electrical and Nuclear Engineering |
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TK7871 |
callnumber-sort |
TK 47871.85 W65 42012 |
genre |
Electronic books. |
genre_facet |
Electronic books. |
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https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=976639 |
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Illustrated |
oclc_num |
806204694 |
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(MiAaPQ)500976639 (Au-PeEL)EBL976639 (CaPaEBR)ebr10570978 (OCoLC)806204694 |
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Semiconductor strain metrology principles and applications / |
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