Semiconductor strain metrology : principles and applications / / Terence K.S. Wong.
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| Year of Publication: | 2012 |
| Language: | English |
| Online Access: | |
| Physical Description: | 136 p. :; ill. |
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| 001 | 500976639 | ||
| 003 | MiAaPQ | ||
| 005 | 20200520144314.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 120813s2012 ts a sb 001 0 eng d | ||
| 020 | |z 9781608053599 | ||
| 035 | |a (MiAaPQ)500976639 | ||
| 035 | |a (Au-PeEL)EBL976639 | ||
| 035 | |a (CaPaEBR)ebr10570978 | ||
| 035 | |a (OCoLC)806204694 | ||
| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7871.85 |b .W65 2012 | |
| 100 | 1 | |a Wong, Terence K. S. | |
| 245 | 1 | 0 | |a Semiconductor strain metrology |h [electronic resource] : |b principles and applications / |c Terence K.S. Wong. |
| 260 | |a [Saif Zone, Sharjah, U.A.E] ; |a Oak Park, IL : |b Bentham Science, |c [2012] | ||
| 300 | |a 136 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Semiconductors |x Design and construction |x Materials. | |
| 650 | 0 | |a Compound semiconductors |x Design and construction |x Materials. | |
| 650 | 0 | |a Silicon-on-insulator technology. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=976639 |z Click to View |