Nanoparticle Engineering for Chemical-Mechanical Planarization : : Fabrication of Next-Generation Nanodevices.
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| TeilnehmendeR: | |
| Place / Publishing House: | Milton : : Taylor & Francis Group,, 2009. Ã2009. |
| Year of Publication: | 2009 |
| Edition: | 1st ed. |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (222 pages) |
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