Nanoparticle Engineering for Chemical-Mechanical Planarization : : Fabrication of Next-Generation Nanodevices.

Nanoparticle Engineering for Chemical-Mechanical Planarization : : Fabrication of Next-Generation Nanodevices.

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Paik, Ungyu.
TeilnehmendeR:
Park, Jea-Gun.
Place / Publishing House:Milton : : Taylor & Francis Group,, 2009.
Ã2009.
Year of Publication:2009
Edition:1st ed.
Language:English
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Physical Description:1 online resource (222 pages)
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record_format marc
spelling Paik, Ungyu.
Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
1st ed.
Milton : Taylor & Francis Group, 2009.
Ã2009.
1 online resource (222 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Park, Jea-Gun.
Print version: Paik, Ungyu Nanoparticle Engineering for Chemical-Mechanical Planarization Milton : Taylor & Francis Group,c2009 9781420059113
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=7245669 Click to View
language English
format eBook
author Paik, Ungyu.
spellingShingle Paik, Ungyu.
Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
author_facet Paik, Ungyu.
Park, Jea-Gun.
author_variant u p up
author2 Park, Jea-Gun.
author2_variant j g p jgp
author2_role TeilnehmendeR
author_sort Paik, Ungyu.
title Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
title_sub Fabrication of Next-Generation Nanodevices.
title_full Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
title_fullStr Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
title_full_unstemmed Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
title_auth Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
title_new Nanoparticle Engineering for Chemical-Mechanical Planarization :
title_sort nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices.
publisher Taylor & Francis Group,
publishDate 2009
physical 1 online resource (222 pages)
edition 1st ed.
isbn 9781000023220
9781420059113
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=7245669
illustrated Not Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/2
dewey-sort 3621.3815 12
dewey-raw 621.3815/2
dewey-search 621.3815/2
oclc_num 1378933305
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