Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.

• Author: Taudt, Christopher.
• Place / Publishing House: Wiesbaden : : Springer Vieweg. in Springer Fachmedien Wiesbaden GmbH,, 2021.; ©2022.
• Year of Publication: 2021
• Edition: 1st ed.
• Language: English
• Physical Description: 1 online resource (180 pages)

Table of Contents

• Intro
• Acknowledgements
• Abstract
• Contents
• List of Symbols
• List of Figures
• List of Tables
• 1 Introduction and Motivation
• 2 Related Works and Basic Considerations
• 2.1 Profilometry
• 2.1.1 Atomic Force Microscopy
• 2.1.2 Confocal Laser Scanning Microscopy
• 2.1.3 Digital Holographic Microscopy
• 2.1.4 Phase-shifting Interferometry
• 2.1.5 Coherence Scanning Interferometry
• 2.1.6 Low-coherence Interferometry
• 2.2 Polymer Cross-linking Characterization
• 2.2.1 Soxhlet-type Extraction
• 2.2.2 Differential Scanning Caliometry
• 2.2.3 Dynamic Mechanical Analysis
• 2.2.4 Spectroscopy-based Methods
• 2.2.5 Low-coherence Interferometry and Other Optical Methods
• 2.2.6 Spatially-resolved Approaches
• 2.3 Film Thickness Measurement
• 2.3.1 Spectral Reflectometry
• 2.3.2 Spectroscopic Ellipsometry
• 2.4 Material dispersion
• 2.4.1 Thermo-optic coefficient
• 2.4.2 Photo-elastic influences
• 2.4.3 Characterization of dispersion
• 3 Surface Profilometry
• 3.1 Experimental Setup
• 3.2 Measurement Range and Resolution
• 3.3 Signal Formation and Analysis
• 3.3.1 Fitting of Oscillating Data
• 3.3.2 Frequency Analysis
• 3.3.3 Two-Stage Fitting
• 3.3.4 Error Estimation of the Data Processing
• 3.4 Two-Dimensional Approach and Characterization
• 3.4.1 Height Standard Evaluation
• 3.4.2 Repeatability and Resolution Characterization
• 3.4.3 Edge Effects
• 3.4.4 Roughness Evaluation
• 3.4.5 High-Dynamic Range Measurements
• 3.4.6 Dual-Channel Approach
• 3.5 Areal Measurement Approaches
• 3.5.1 Translation-Based Areal Information
• 3.5.2 Alternative Spectral Encoding for Areal Measurements
• 4 Polymer Characterization
• 4.1 Temporal Approach
• 4.2 Scan-free Approach
• 4.2.1 Wrapped-phase Derivative Evaluation (WPDE)
• 4.2.2 Spatially-resolved Approaches
• 4.3 Influences and Limitations.
• 4.3.1 Error Parameters of the Temporal Approach
• 4.3.2 Error Propagation in WPDE
• 5 Thin-film Characterization
• 5.1 Setup Considerations
• 5.2 Characterization of Thin-films on Bulk Substrates
• 5.3 Characterization of Flexible Substrate Materials
• 6 Conclusion
• A Glossary
• Publications
• Bibliography.