Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.

• Author: Taudt, Christopher.
• Place / Publishing House: Wiesbaden : : Springer Vieweg. in Springer Fachmedien Wiesbaden GmbH,, 2021.; ©2022.
• Year of Publication: 2021
• Edition: 1st ed.
• Language: English
• Physical Description: 1 online resource (180 pages)

Table of Contents

Intro -- Acknowledgements -- Abstract -- Contents -- List of Symbols -- List of Figures -- List of Tables -- 1 Introduction and Motivation -- 2 Related Works and Basic Considerations -- 2.1 Profilometry -- 2.1.1 Atomic Force Microscopy -- 2.1.2 Confocal Laser Scanning Microscopy -- 2.1.3 Digital Holographic Microscopy -- 2.1.4 Phase-shifting Interferometry -- 2.1.5 Coherence Scanning Interferometry -- 2.1.6 Low-coherence Interferometry -- 2.2 Polymer Cross-linking Characterization -- 2.2.1 Soxhlet-type Extraction -- 2.2.2 Differential Scanning Caliometry -- 2.2.3 Dynamic Mechanical Analysis -- 2.2.4 Spectroscopy-based Methods -- 2.2.5 Low-coherence Interferometry and Other Optical Methods -- 2.2.6 Spatially-resolved Approaches -- 2.3 Film Thickness Measurement -- 2.3.1 Spectral Reflectometry -- 2.3.2 Spectroscopic Ellipsometry -- 2.4 Material dispersion -- 2.4.1 Thermo-optic coefficient -- 2.4.2 Photo-elastic influences -- 2.4.3 Characterization of dispersion -- 3 Surface Profilometry -- 3.1 Experimental Setup -- 3.2 Measurement Range and Resolution -- 3.3 Signal Formation and Analysis -- 3.3.1 Fitting of Oscillating Data -- 3.3.2 Frequency Analysis -- 3.3.3 Two-Stage Fitting -- 3.3.4 Error Estimation of the Data Processing -- 3.4 Two-Dimensional Approach and Characterization -- 3.4.1 Height Standard Evaluation -- 3.4.2 Repeatability and Resolution Characterization -- 3.4.3 Edge Effects -- 3.4.4 Roughness Evaluation -- 3.4.5 High-Dynamic Range Measurements -- 3.4.6 Dual-Channel Approach -- 3.5 Areal Measurement Approaches -- 3.5.1 Translation-Based Areal Information -- 3.5.2 Alternative Spectral Encoding for Areal Measurements -- 4 Polymer Characterization -- 4.1 Temporal Approach -- 4.2 Scan-free Approach -- 4.2.1 Wrapped-phase Derivative Evaluation (WPDE) -- 4.2.2 Spatially-resolved Approaches -- 4.3 Influences and Limitations.

4.3.1 Error Parameters of the Temporal Approach -- 4.3.2 Error Propagation in WPDE -- 5 Thin-film Characterization -- 5.1 Setup Considerations -- 5.2 Characterization of Thin-films on Bulk Substrates -- 5.3 Characterization of Flexible Substrate Materials -- 6 Conclusion -- A Glossary -- Publications -- Bibliography.