Time-Resolved CVD of Group 13-Nitrides.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2148 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2021. {copy}2021. |
| Year of Publication: | 2021 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (73 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig Sammanfattning
- Preface
- Acknowledgement
- Papers Included in the Thesis and Contribution
- Papers not Included in the Thesis
- Table of Contents
- Chapter 1 - Introduction
- Chapter 2 - ALD
- Chapter 3 - Precursors
- Chapter 4 - Group 13-Nitrides
- Chapter 5 - Thin film Deposition of Group 13-Nitrides
- Chapter 6 - Substrates and Crystal Growth
- Chapter 7 - Characterisation
- Chapter 8 - Contribution to the Field
- Chapter 9 - Outlook
- References
- Papers.