Time-Resolved CVD of Group 13-Nitrides.

Time-Resolved CVD of Group 13-Nitrides.

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Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.2148
:
Rouf, Polla.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2021.
{copy}2021.
Year of Publication:2021
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
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Physical Description:1 online resource (73 pages)
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(OCoLC)1266905220
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spelling Rouf, Polla.
Time-Resolved CVD of Group 13-Nitrides.
1st ed.
Linköping : Linkopings Universitet, 2021.
{copy}2021.
1 online resource (73 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.2148
Intro -- Abstract -- Populärvetenskaplig Sammanfattning -- Preface -- Acknowledgement -- Papers Included in the Thesis and Contribution -- Papers not Included in the Thesis -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - ALD -- Chapter 3 - Precursors -- Chapter 4 - Group 13-Nitrides -- Chapter 5 - Thin film Deposition of Group 13-Nitrides -- Chapter 6 - Substrates and Crystal Growth -- Chapter 7 - Characterisation -- Chapter 8 - Contribution to the Field -- Chapter 9 - Outlook -- References -- Papers.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Rouf, Polla Time-Resolved CVD of Group 13-Nitrides Linköping : Linkopings Universitet,c2021
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=6693082 Click to View
language English
format eBook
author Rouf, Polla.
spellingShingle Rouf, Polla.
Time-Resolved CVD of Group 13-Nitrides.
Linköping Studies in Science and Technology. Dissertations Series ;
Intro -- Abstract -- Populärvetenskaplig Sammanfattning -- Preface -- Acknowledgement -- Papers Included in the Thesis and Contribution -- Papers not Included in the Thesis -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - ALD -- Chapter 3 - Precursors -- Chapter 4 - Group 13-Nitrides -- Chapter 5 - Thin film Deposition of Group 13-Nitrides -- Chapter 6 - Substrates and Crystal Growth -- Chapter 7 - Characterisation -- Chapter 8 - Contribution to the Field -- Chapter 9 - Outlook -- References -- Papers.
author_facet Rouf, Polla.
author_variant p r pr
author_sort Rouf, Polla.
title Time-Resolved CVD of Group 13-Nitrides.
title_full Time-Resolved CVD of Group 13-Nitrides.
title_fullStr Time-Resolved CVD of Group 13-Nitrides.
title_full_unstemmed Time-Resolved CVD of Group 13-Nitrides.
title_auth Time-Resolved CVD of Group 13-Nitrides.
title_new Time-Resolved CVD of Group 13-Nitrides.
title_sort time-resolved cvd of group 13-nitrides.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2021
physical 1 online resource (73 pages)
edition 1st ed.
contents Intro -- Abstract -- Populärvetenskaplig Sammanfattning -- Preface -- Acknowledgement -- Papers Included in the Thesis and Contribution -- Papers not Included in the Thesis -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - ALD -- Chapter 3 - Precursors -- Chapter 4 - Group 13-Nitrides -- Chapter 5 - Thin film Deposition of Group 13-Nitrides -- Chapter 6 - Substrates and Crystal Growth -- Chapter 7 - Characterisation -- Chapter 8 - Contribution to the Field -- Chapter 9 - Outlook -- References -- Papers.
isbn 9789179296315
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=6693082
illustrated Not Illustrated
oclc_num 1266905220
work_keys_str_mv AT roufpolla timeresolvedcvdofgroup13nitrides
status_str n
ids_txt_mv (MiAaPQ)5006693082
(Au-PeEL)EBL6693082
(OCoLC)1266905220
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.2148
is_hierarchy_title Time-Resolved CVD of Group 13-Nitrides.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.2148
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
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