Handbook of surface and nanometrology / David J. Whitehouse.
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| Year of Publication: | 2011 |
| Edition: | 2nd ed. |
| Language: | English |
| Online Access: | |
| Physical Description: | xxiii, 975 p. :; ill. |
| Notes: | Rev. ed. of: Handbook of surface metrology. c1994. |
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| Other title: | Handbook of surface metrology. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1420082019 9781420082012 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | David J. Whitehouse. |