Engineered Ion-Bombardment As a Tool in Thin Film Deposition.
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Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2124 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2021. {copy}2021. |
Year of Publication: | 2021 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Online Access: | |
Physical Description: | 1 online resource (84 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig sammanfattning
- Preface
- Included papers
- Contributions to the included papers
- Acknowledgements
- Contents
- 1. Introduction
- 2. Sputtering process
- 3. Thin film growth
- 4. Plasma characterization of ionic species
- 5. Material characterization
- 6. Summary and contribution to the field
- 7. Future outlook
- Bibiliography
- Papers.