Introduction to microfabrication

Introduction to microfabrication / Sami Franssila.

Saved in:
Bibliographic Details
:
ProQuest (Firm)
Franssila, Sami.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:2010
Edition:2nd ed.
Language:English
Online Access:
Physical Description:xiv, 518 p. :; ill.
Notes:Includes index.
Tags: Add Tag
No Tags, Be the first to tag this record!
id 500589187
ctrlnum (MiAaPQ)500589187
(Au-PeEL)EBL589187
(CaPaEBR)ebr10419414
(CaONFJC)MIL277706
(OCoLC)689995003
collection bib_alma
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01321nam a2200373Ia 4500</leader><controlfield tag="001">500589187</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20200520144314.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cn|||||||||</controlfield><controlfield tag="008">100317s2010 enka s 001 0 eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="z"> 2010010076</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9780470749838 (cloth)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)500589187</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL589187</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr10419414</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaONFJC)MIL277706</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)689995003</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7875</subfield><subfield code="b">.F73 2010</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Franssila, Sami.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to microfabrication</subfield><subfield code="h">[electronic resource] /</subfield><subfield code="c">Sami Franssila.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2nd ed.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">Chichester, West Sussex, England ;</subfield><subfield code="a">Hoboken, NJ :</subfield><subfield code="b">John Wiley &amp; Sons,</subfield><subfield code="c">2010.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xiv, 518 p. :</subfield><subfield code="b">ill.</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes index.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microelectromechanical systems.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Electronic apparatus and appliances.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microfabrication.</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=589187</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>
record_format marc
spelling Franssila, Sami.
Introduction to microfabrication [electronic resource] / Sami Franssila.
2nd ed.
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
xiv, 518 p. : ill.
Includes index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=589187 Click to View
language English
format Electronic
eBook
author Franssila, Sami.
spellingShingle Franssila, Sami.
Introduction to microfabrication
author_facet Franssila, Sami.
ProQuest (Firm)
ProQuest (Firm)
author_variant s f sf
author2 ProQuest (Firm)
author2_role TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Franssila, Sami.
title Introduction to microfabrication
title_full Introduction to microfabrication [electronic resource] / Sami Franssila.
title_fullStr Introduction to microfabrication [electronic resource] / Sami Franssila.
title_full_unstemmed Introduction to microfabrication [electronic resource] / Sami Franssila.
title_auth Introduction to microfabrication
title_new Introduction to microfabrication
title_sort introduction to microfabrication
publisher John Wiley & Sons,
publishDate 2010
physical xiv, 518 p. : ill.
edition 2nd ed.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 F73 42010
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=589187
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 689995003
work_keys_str_mv AT franssilasami introductiontomicrofabrication
AT proquestfirm introductiontomicrofabrication
status_str n
ids_txt_mv (MiAaPQ)500589187
(Au-PeEL)EBL589187
(CaPaEBR)ebr10419414
(CaONFJC)MIL277706
(OCoLC)689995003
is_hierarchy_title Introduction to microfabrication
author2_original_writing_str_mv noLinkedField
_version_ 1792330704749592576

Similar Items