Deposition of Al-Doped ZnO Films by High Power Impulse Magnetron Sputtering.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1889 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2017. {copy}2017. |
| Year of Publication: | 2017 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (108 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskapligsammanfattning
- Résumé étendu
- Preface
- Included papers and author's contribution
- Acknowledgements
- Abbreviations
- Contents
- Introduction
- Transparent conducting oxides
- The sputter deposition process
- Characterization methods
- Summary of the results
- Contributions and future work
- Bibliography
- Papers.