Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems / / edited by Henry Baltes ... [et al.].
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Year of Publication: | 2013 |
Language: | English |
Online Access: | |
Physical Description: | xii, 427 p. :; ill. |
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Bibliography: | Includes bibliographical references and index. |
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ISBN: | 9783527334988 9783527675043 (electronic bk.) |
Hierarchical level: | Monograph |
Statement of Responsibility: | edited by Henry Baltes ... [et al.]. |