Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / / Milan Yazdanfar.
Saved in:
| Superior document: | Linkoping Studies in Science and Technology Dissertations, Number 1625 |
|---|---|
| VerfasserIn: | |
| Place / Publishing House: | Linkoping, Sweden : : Linkoping University,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Online Access: | |
| Physical Description: | 1 online resource (63 pages) :; illustrations. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!