Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / / Milan Yazdanfar.

Saved in:
Bibliographic Details
Superior document:Linkoping Studies in Science and Technology Dissertations, Number 1625
VerfasserIn:
Yazdanfar, Milan,
Place / Publishing House:Linkoping, Sweden : : Linkoping University,, 2014.
2014
Year of Publication:2014
Language:English
Series:Linkoping studies in science and technology. Dissertations ; Number 1625.
Online Access:
Physical Description:1 online resource (63 pages) :; illustrations.
Tags: Add Tag
No Tags, Be the first to tag this record!
id 5003328156
ctrlnum (MiAaPQ)5003328156
(Au-PeEL)EBL3328156
(CaPaEBR)ebr10953561
(OCoLC)896833600
collection bib_alma
record_format marc
spelling Yazdanfar, Milan, author.
Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar.
Linkoping, Sweden : Linkoping University, 2014.
2014
1 online resource (63 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Linkoping Studies in Science and Technology Dissertations, 0345-7524 ; Number 1625
Includes bibliographical references.
Description based on online resource; title from PDF title page (ebrary, viewed October 22, 2014).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Silicon carbide Research.
Electronic books.
ProQuest (Firm)
Linkoping studies in science and technology. Dissertations ; Number 1625.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3328156 Click to View
language English
format eBook
author Yazdanfar, Milan,
spellingShingle Yazdanfar, Milan,
Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Linkoping Studies in Science and Technology Dissertations,
author_facet Yazdanfar, Milan,
author_variant m y my
author_role VerfasserIn
author_sort Yazdanfar, Milan,
title Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
title_full Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar.
title_fullStr Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar.
title_full_unstemmed Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar.
title_auth Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
title_new Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
title_sort precursors and defect control for halogenated cvd of thick sic epitaxial layers /
series Linkoping Studies in Science and Technology Dissertations,
series2 Linkoping Studies in Science and Technology Dissertations,
publisher Linkoping University,
publishDate 2014
physical 1 online resource (63 pages) : illustrations.
isbn 9789175192130 (e-book)
issn 0345-7524 ;
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.15 S56 Y393 42014
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3328156
illustrated Illustrated
dewey-hundreds 500 - Science
dewey-tens 540 - Chemistry
dewey-ones 546 - Inorganic chemistry
dewey-full 546.6832
dewey-sort 3546.6832
dewey-raw 546.6832
dewey-search 546.6832
oclc_num 896833600
work_keys_str_mv AT yazdanfarmilan precursorsanddefectcontrolforhalogenatedcvdofthicksicepitaxiallayers
status_str n
ids_txt_mv (MiAaPQ)5003328156
(Au-PeEL)EBL3328156
(CaPaEBR)ebr10953561
(OCoLC)896833600
hierarchy_parent_title Linkoping Studies in Science and Technology Dissertations, Number 1625
hierarchy_sequence Number 1625.
is_hierarchy_title Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
container_title Linkoping Studies in Science and Technology Dissertations, Number 1625
_version_ 1792330858436231169
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01666nam a2200397 i 4500</leader><controlfield tag="001">5003328156</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20200520144314.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">141022t20142014sw a ob 000 0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9789175192130 (e-book)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5003328156</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL3328156</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr10953561</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)896833600</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7871.15.S56</subfield><subfield code="b">.Y393 2014</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">546.6832</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Yazdanfar, Milan,</subfield><subfield code="e">author.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /</subfield><subfield code="c">Milan Yazdanfar.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Linkoping, Sweden :</subfield><subfield code="b">Linkoping University,</subfield><subfield code="c">2014.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">2014</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (63 pages) :</subfield><subfield code="b">illustrations.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Linkoping Studies in Science and Technology Dissertations,</subfield><subfield code="x">0345-7524 ;</subfield><subfield code="v">Number 1625</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references.</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on online resource; title from PDF title page (ebrary, viewed October 22, 2014).</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Silicon carbide</subfield><subfield code="x">Research.</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Linkoping studies in science and technology.</subfield><subfield code="p">Dissertations ;</subfield><subfield code="v">Number 1625.</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3328156</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>

Similar Items