High resolution 3D nanoimprint technology : template fabrication, application in Fabry-Perot-filter-based nanospectrometers / / Xiaolin Wang.
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| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | iii, 160 p. :; ill. (chiefly col.) |
| Notes: | Summary in German. |
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