A Quantum Chemical Exploration of SiC Chemical Vapor Deposition.
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Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1828 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2017. {copy}2017. |
Year of Publication: | 2017 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Online Access: | |
Physical Description: | 1 online resource (53 pages) |
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Table of Contents:
- Intro
- Abstract
- Sammanfattning
- Acknowledgement
- List of included publications
- Table of Contents
- Chapter 1 Introduction
- Chapter 2 Quantum Chemical Calculations
- Chapter 3 Quantum Chemistry in CVD Modeling
- Chapter 4 Results and Summary
- References.