A Study of Group 13-Nitride Atomic Layer Deposition : : Computational Chemistry Modelling of Atomistic Deposition Processes.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2295 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2023. {copy}2023. |
| Year of Publication: | 2023 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (98 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig sammanfattning
- Preface
- Acknowledgments
- List of Papers Included in the Thesis
- List of Relevant Papers not Included in the Thesis
- List of Abbreviations
- Table of Contents
- Chapter 1 - Introduction
- Chapter 2 - Vapor Deposition Techniques
- Chapter 3 - Modelling of ALD
- Chapter 4 - Quantum Chemical Modelling
- Chapter 5 - Statistical Thermodynamics and Kinetics
- Chapter 6 - Contributions to The Field
- Chapter 7 - Outlooks and Future Aspects
- References
- Papers.