Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy.
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| Superior document: | Linköping Studies in Science and Technology. Licentiate Thesis Series ; v.1944 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2022. {copy}2022. |
| Year of Publication: | 2022 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Licentiate Thesis Series
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| Online Access: | |
| Physical Description: | 1 online resource (71 pages) |
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