Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy.
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| Superior document: | Linköping Studies in Science and Technology. Licentiate Thesis Series ; v.1944 |
|---|---|
| : | |
| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2022. {copy}2022. |
| Year of Publication: | 2022 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Licentiate Thesis Series
|
| Online Access: | |
| Physical Description: | 1 online resource (71 pages) |
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50030229563 |
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(MiAaPQ)50030229563 (Au-PeEL)EBL30229563 (OCoLC)1366125314 |
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marc |
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Chang, Jui-Che. Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. 1st ed. Linköping : Linkopings Universitet, 2022. {copy}2022. 1 online resource (71 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier Linköping Studies in Science and Technology. Licentiate Thesis Series ; v.1944 Description based on publisher supplied metadata and other sources. Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. Electronic books. Print version: Chang, Jui-Che Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy Linköping : Linkopings Universitet,c2022 9789179294991 ProQuest (Firm) Linköping Studies in Science and Technology. Licentiate Thesis Series https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30229563 Click to View |
| language |
English |
| format |
eBook |
| author |
Chang, Jui-Che. |
| spellingShingle |
Chang, Jui-Che. Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. Linköping Studies in Science and Technology. Licentiate Thesis Series ; |
| author_facet |
Chang, Jui-Che. |
| author_variant |
j c c jcc |
| author_sort |
Chang, Jui-Che. |
| title |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_full |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_fullStr |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_full_unstemmed |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_auth |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_new |
Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| title_sort |
metastable orthorhombic ta 3 n 5 thin films grown by magnetron sputter epitaxy. |
| series |
Linköping Studies in Science and Technology. Licentiate Thesis Series ; |
| series2 |
Linköping Studies in Science and Technology. Licentiate Thesis Series ; |
| publisher |
Linkopings Universitet, |
| publishDate |
2022 |
| physical |
1 online resource (71 pages) |
| edition |
1st ed. |
| isbn |
9789179295004 9789179294991 |
| genre |
Electronic books. |
| genre_facet |
Electronic books. |
| url |
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30229563 |
| illustrated |
Not Illustrated |
| oclc_num |
1366125314 |
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AT changjuiche metastableorthorhombicta3n5thinfilmsgrownbymagnetronsputterepitaxy |
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n |
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(MiAaPQ)50030229563 (Au-PeEL)EBL30229563 (OCoLC)1366125314 |
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cr |
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Linköping Studies in Science and Technology. Licentiate Thesis Series ; v.1944 |
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Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. |
| container_title |
Linköping Studies in Science and Technology. Licentiate Thesis Series ; v.1944 |
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Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ] |
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