Surface-Controlled Chemical Vapor Deposition of Silicon Carbide.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2263 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2022. {copy}2022. |
| Year of Publication: | 2022 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (72 pages) |
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Table of Contents:
- Intro
- Abstract
- Svensk Sammanfattning
- 文摘
- Acknowledgement
- List of Articles
- Table of Contents
- 1 Introduction
- 2 Chemical Vapor Deposition
- 3 Surface-Controlled Chemical Vapor Deposition
- 4 Silicon Carbide
- 5 Characterization Techniques
- 6 Contribution to the Field
- 7 Outlook
- References
- Papers.