Analysis and design principles of MEMS devices

Analysis and design principles of MEMS devices / by Minhang Bao.

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ProQuest (Firm)
Bao, Min-Hang.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:2005
Language:English
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Physical Description:xii, 312 p. :; ill.
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record_format marc
spelling Bao, Min-Hang.
Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.
Amsterdam ; Oxford : Elsevier, c2005.
xii, 312 p. : ill.
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems.
Microtechnology.
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=269949 Click to View
language English
format Electronic
eBook
author Bao, Min-Hang.
spellingShingle Bao, Min-Hang.
Analysis and design principles of MEMS devices
author_facet Bao, Min-Hang.
ProQuest (Firm)
ProQuest (Firm)
author_variant m h b mhb
author2 ProQuest (Firm)
author2_role TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Bao, Min-Hang.
title Analysis and design principles of MEMS devices
title_full Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.
title_fullStr Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.
title_full_unstemmed Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.
title_auth Analysis and design principles of MEMS devices
title_new Analysis and design principles of MEMS devices
title_sort analysis and design principles of mems devices
publisher Elsevier,
publishDate 2005
physical xii, 312 p. : ill.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 B36 42005
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=269949
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 162130017
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is_hierarchy_title Analysis and design principles of MEMS devices
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