Technology evolution for silicon nano-electronics : selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan / / edited by Seiichi Miyazaki and Hitoshi Tabata.
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| Year of Publication: | 2011 |
| Language: | English |
| Series: | Key engineering materials,
v. 470 |
| Online Access: | |
| Physical Description: | xi, 234 p. :; ill. |
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| Other title: | Proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics International Symposium on Technology Evolution for Silicon Nano-Electronics |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 3037850515 9783037850510 9783038134947 (electronic bk.) |
| ISSN: | 1013-9826 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Seiichi Miyazaki and Hitoshi Tabata. |