Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films : : Material Development and Applications in Microdevices / / edited by Agnė Žukauskaitė.
Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to...
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| Place / Publishing House: | Basel, Switzerland : : MDPI - Multidisciplinary Digital Publishing Institute,, [2023] ©2023 |
| Year of Publication: | 2023 |
| Language: | English |
| Physical Description: | 1 online resource (186 pages) |
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Electronic
| DOAB Directory of Open Access Books | Available |