Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices

Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices

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spelling Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
Nanoparticle Engineering for Chemical-Mechanical Planarization
CRC Press
1-000-02322-2
language English
format Book
title Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
spellingShingle Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_full Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_fullStr Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_full_unstemmed Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_auth Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_alt Nanoparticle Engineering for Chemical-Mechanical Planarization
title_new Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
title_sort nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
publisher CRC Press
isbn 1-000-02322-2
illustrated Not Illustrated
status_str n
ids_txt_mv (CKB)4920000000809866
(EXLCZ)994920000000809866
is_hierarchy_title Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
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