Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

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Year of Publication:2021
Language:English
Physical Description:1 online resource (180 p.)
Notes:Description based upon print version of record.
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spelling Taudt, Christopher.
Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
Wiesbaden : Springer Fachmedien Wiesbaden GmbH, 2021.
1 online resource (180 p.)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Description based upon print version of record.
This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
English
Optical physics bicssc
Mensuration & systems of measurement bicssc
surface metrology
profilometry
interferometry
low-coherence interferometry
semiconductor manufacturing
optical metrology
Open Access
3-658-35925-0
language English
format eBook
author Taudt, Christopher.
spellingShingle Taudt, Christopher.
Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
author_facet Taudt, Christopher.
author_variant c t ct
author_sort Taudt, Christopher.
title Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_full Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_fullStr Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_full_unstemmed Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_auth Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_new Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
title_sort development and characterization of a dispersion-encoded method for low-coherence interferometry.
publisher Springer Fachmedien Wiesbaden GmbH,
publishDate 2021
physical 1 online resource (180 p.)
isbn 3-658-35926-9
3-658-35925-0
callnumber-first T - Technology
callnumber-subject TA - General and Civil Engineering
callnumber-label TA1671-1707
callnumber-sort TA 41671 41707
illustrated Not Illustrated
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