Ion implantation : : research and application.
Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues esp...
Saved in:
| : | |
|---|---|
| TeilnehmendeR: | |
| Place / Publishing House: | [Place of publication not identified] : : IntechOpen,, 2017. ©2017 |
| Year of Publication: | 2017 |
| Language: | English |
| Physical Description: | 1 online resource (154 pages) |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| id |
993545608404498 |
|---|---|
| ctrlnum |
(CKB)4970000000099462 (iGPub)INOP0000791 (oapen)https://directory.doabooks.org/handle/20.500.12854/50661 (EXLCZ)994970000000099462 |
| collection |
bib_alma |
| record_format |
marc |
| spelling |
Ishaq Ahmad auth Ion implantation : research and application. Ion implantation IntechOpen 2017 [Place of publication not identified] : IntechOpen, 2017. ©2017 1 online resource (154 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials. English SCIENCE / Mechanics / Thermodynamics. bisacsh Physical Sciences Engineering and Technology Materials Science Thermal Engineering Metals and Nonmetals 953-51-3237-7 Ahmad, Ishaq, editor |
| language |
English |
| format |
eBook |
| author |
Ishaq Ahmad |
| spellingShingle |
Ishaq Ahmad Ion implantation : research and application. |
| author_facet |
Ishaq Ahmad Ahmad, Ishaq, |
| author_variant |
i a ia |
| author2 |
Ahmad, Ishaq, |
| author2_variant |
i a ia |
| author2_role |
TeilnehmendeR |
| author_sort |
Ishaq Ahmad |
| title |
Ion implantation : research and application. |
| title_sub |
research and application. |
| title_full |
Ion implantation : research and application. |
| title_fullStr |
Ion implantation : research and application. |
| title_full_unstemmed |
Ion implantation : research and application. |
| title_auth |
Ion implantation : research and application. |
| title_alt |
Ion implantation |
| title_new |
Ion implantation : |
| title_sort |
ion implantation : research and application. |
| publisher |
IntechOpen IntechOpen, |
| publishDate |
2017 |
| physical |
1 online resource (154 pages) |
| isbn |
953-51-4793-5 953-51-3238-5 953-51-3237-7 |
| callnumber-first |
T - Technology |
| callnumber-subject |
TS - Manufactures |
| callnumber-label |
TS695 |
| callnumber-sort |
TS 3695 |
| illustrated |
Illustrated |
| dewey-hundreds |
500 - Science |
| dewey-tens |
530 - Physics |
| dewey-ones |
530 - Physics |
| dewey-full |
530 |
| dewey-sort |
3530 |
| dewey-raw |
530 |
| dewey-search |
530 |
| work_keys_str_mv |
AT ishaqahmad ionimplantationresearchandapplication AT ahmadishaq ionimplantationresearchandapplication AT ishaqahmad ionimplantation AT ahmadishaq ionimplantation |
| status_str |
n |
| ids_txt_mv |
(CKB)4970000000099462 (iGPub)INOP0000791 (oapen)https://directory.doabooks.org/handle/20.500.12854/50661 (EXLCZ)994970000000099462 |
| carrierType_str_mv |
cr |
| is_hierarchy_title |
Ion implantation : research and application. |
| author2_original_writing_str_mv |
noLinkedField |
| _version_ |
1801159555394043905 |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02136nam a2200433 i-4500</leader><controlfield tag="001">993545608404498</controlfield><controlfield tag="005">20240606213241.0</controlfield><controlfield tag="006">m eo d </controlfield><controlfield tag="007">cr#cn#|||m|||a</controlfield><controlfield tag="008">200212s2017#### obo 000 0 0|eng </controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">953-51-4793-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">953-51-3238-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CKB)4970000000099462</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(iGPub)INOP0000791</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(oapen)https://directory.doabooks.org/handle/20.500.12854/50661</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(EXLCZ)994970000000099462</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1="0" ind2="0"><subfield code="a">TS695</subfield></datafield><datafield tag="082" ind1="0" ind2="0"><subfield code="a">530</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ishaq Ahmad</subfield><subfield code="4">auth</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation :</subfield><subfield code="b">research and application.</subfield></datafield><datafield tag="246" ind1=" " ind2=" "><subfield code="a">Ion implantation</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="b">IntechOpen</subfield><subfield code="c">2017</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">[Place of publication not identified] :</subfield><subfield code="b">IntechOpen,</subfield><subfield code="c">2017.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">©2017</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (154 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.</subfield></datafield><datafield tag="546" ind1=" " ind2=" "><subfield code="a">English</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Mechanics / Thermodynamics.</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Physical Sciences</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Engineering and Technology</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Materials Science</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Thermal Engineering</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Metals and Nonmetals</subfield></datafield><datafield tag="776" ind1=" " ind2=" "><subfield code="z">953-51-3237-7</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ahmad, Ishaq,</subfield><subfield code="e">editor</subfield></datafield><datafield tag="906" ind1=" " ind2=" "><subfield code="a">BOOK</subfield></datafield><datafield tag="ADM" ind1=" " ind2=" "><subfield code="b">2024-06-07 01:43:07 Europe/Vienna</subfield><subfield code="f">system</subfield><subfield code="c">marc21</subfield><subfield code="a">2019-04-13 22:04:18 Europe/Vienna</subfield><subfield code="g">false</subfield></datafield><datafield tag="AVE" ind1=" " ind2=" "><subfield code="i">DOAB Directory of Open Access Books</subfield><subfield code="P">DOAB Directory of Open Access Books</subfield><subfield code="x">https://eu02.alma.exlibrisgroup.com/view/uresolver/43ACC_OEAW/openurl?u.ignore_date_coverage=true&portfolio_pid=5351636730004498&Force_direct=true</subfield><subfield code="Z">5351636730004498</subfield><subfield code="b">Available</subfield><subfield code="8">5351636730004498</subfield></datafield></record></collection> |