Miniaturized Silicon Photodetectors : New Perspectives and Applications
Silicon (Si) technologies provide an excellent platform for the design of microsystems where photonic and microelectronic functionalities are monolithically integrated on the same substrate. In recent years, a variety of passive and active Si photonic devices have been developed, and among them, pho...
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Year of Publication: | 2021 |
Language: | English |
Physical Description: | 1 electronic resource (148 p.) |
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