Characterisation of silicon on insulator material with X-ray diffraction topography

Characterisation of silicon on insulator material with X-ray diffraction topography / von Michael Ohler

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VerfasserIn:
Ohler, Michael 1967-
Place / Publishing House:1997
Year of Publication:1997
Language:English
Physical Description:114 S.; Ill., graph. Darst.; 21 cm
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spelling Ohler, Michael 1967- (DE-588)115776796 aut
Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler
1997
114 S. Ill., graph. Darst. 21 cm
Berlin, Humboldt-Univ., Diss., 1997
YWOAW MAG1-3 27396-B 2217668620004498
language English
format Thesis
Book
author Ohler, Michael 1967-
spellingShingle Ohler, Michael 1967-
Characterisation of silicon on insulator material with X-ray diffraction topography
author_facet Ohler, Michael 1967-
author_variant m o mo
author_role VerfasserIn
author_sort Ohler, Michael 1967-
title Characterisation of silicon on insulator material with X-ray diffraction topography
title_full Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler
title_fullStr Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler
title_full_unstemmed Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler
title_auth Characterisation of silicon on insulator material with X-ray diffraction topography
title_new Characterisation of silicon on insulator material with X-ray diffraction topography
title_sort characterisation of silicon on insulator material with x-ray diffraction topography
publishDate 1997
physical 114 S. Ill., graph. Darst. 21 cm
callnumber-raw 27396-B
callnumber-search 27396-B
illustrated Illustrated
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is_hierarchy_title Characterisation of silicon on insulator material with X-ray diffraction topography
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