Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films

Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films / Heino Ratinen

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Bibliographic Details
Superior document:Acta Universitatis Ouluensis : A, Scientiae rerum naturalium 34
VerfasserIn:
Ratinen, Heino
Place / Publishing House:Oulu : Univ., 1975
Year of Publication:1975
Language:English
Series:Acta Universitatis Ouluensis : A, Scientiae rerum naturalium 34
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica 7
Subjects:
RF-sputtering Glühentladung Optische Spektroskopie (DE-588)4043680-9
Physical Description:Getr. Zähl.; graph. Darst.
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spelling Ratinen, Heino aut
Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films Heino Ratinen
Oulu Univ. 1975
Getr. Zähl. graph. Darst.
Acta Universitatis Ouluensis : A, Scientiae rerum naturalium 34
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica 7
RF-sputtering f
Glühentladung f
Optische Spektroskopie s (DE-588)4043680-9
AT-OBV Automatisch aus BVB_2012-06 2013-05-30
(AT-OBV)AC01426013 34
(AT-OBV)AC02689929 7
YWOAW MAG1 88158.34 2221082910004498
language English
format Book
author Ratinen, Heino
spellingShingle Ratinen, Heino
Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films
Acta Universitatis Ouluensis : A, Scientiae rerum naturalium
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica
RF-sputtering
Glühentladung
Optische Spektroskopie (DE-588)4043680-9
author_facet Ratinen, Heino
author_variant h r hr
author_role VerfasserIn
author_sort Ratinen, Heino
title Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films
title_full Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films Heino Ratinen
title_fullStr Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films Heino Ratinen
title_full_unstemmed Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films Heino Ratinen
title_auth Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films
title_new Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films
title_sort application of optical spectroscopy to the analysis of the luminescence from rf-sputtering glow discharge and sputtered films
series Acta Universitatis Ouluensis : A, Scientiae rerum naturalium
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica
series2 Acta Universitatis Ouluensis : A, Scientiae rerum naturalium
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica
publisher Univ.
publishDate 1975
physical Getr. Zähl. graph. Darst.
isbn 9514202619
callnumber-raw 88158.34
callnumber-search 88158.34
topic RF-sputtering
Glühentladung
Optische Spektroskopie (DE-588)4043680-9
topic_facet RF-sputtering
Glühentladung
Optische Spektroskopie
illustrated Not Illustrated
work_keys_str_mv AT ratinenheino applicationofopticalspectroscopytotheanalysisoftheluminescencefromrfsputteringglowdischargeandsputteredfilms
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hierarchy_parent_title Acta Universitatis Ouluensis : A, Scientiae rerum naturalium 34
Acta Universitatis Ouluensis : Seria A, Scientiae rerum naturalium : Physica 7
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is_hierarchy_title Application of optical spectroscopy to the analysis of the luminescence from RF-sputtering glow discharge and sputtered films
container_title Acta Universitatis Ouluensis : A, Scientiae rerum naturalium 34
container_reference AC01426013
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